Research articles
ScienceAsia 46 (2020):ID 444-449 |doi:
10.2306/scienceasia1513-1874.2020.054
Surface treatment of polyimide using atmospheric
pressure dielectric barrier discharge plasma
Edy Riyanto
ABSTRACT: In this study, polyimide was treated by atmospheric pressure dielectric barrier discharge plasma using a
helium and/or helium-oxygen mixture gasses. The polyimide was placed between copper electrodes with dielectric
material installed on the cathode electrode. To investigate the surface treatment, the plasmas as a function of power,
treatment time, and plasma gasses were introduced on the polyimide substrate. The experimental results show that the
polyimide treated by dielectric barrier discharge plasma increases the wetting property. This property can be attributed
to the surface roughness and the water compatible functional groups. The roughness increases by helium plasma
treatment and can be further improved by increasing plasma power or the presence of oxygen in the helium-oxygen
mixture plasma. On the other hand, the plasma surface treatment led to formation of oxygen related functional groups
of -C=O and -OH.
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Research Center for Electrical Power and Mechatronics, Indonesian Institute of Sciences, Bandung 40135
Indonesia |
* Corresponding author, E-mail: edy.riyanto@lipi.go.id
Received 31 Mar 2019, Accepted 23 Jun 2020
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